Mich. Admin. Code R. 29.1672

Current through Vol. 24-21, December 1, 2024

Section R. 29.1672 - Semiconductor facilities

Rule 22. Section 23.3 of the code is deleted and section 23.1 of chapter 23 of the code is amended to read as follows:

23.1 General. All semiconductor facilities containing a clean room or a clean zone, or both, shall comply with NFPA 318, standard for the protection of semiconductor fabrication facilities, and chapter 23 as they relate to operation and maintenance.

23.3 Deleted.

Mich. Admin. Code R. 29.1672

2011 AACS