40 C.F.R. § 98 app Table I-1 to Subpart I of Part 98

Current through September 30, 2024
Appendix Table I-1 to Subpart I of Part 98 - Default Emission Factors for Threshold Applicability Determination

Product typeEmission factors EFi
CF4 C2F6 CHF3 C3F8 NF3 SF6
Semiconductors (kg/m2)0.901.000.040.050.040.20
LCD (g/m2)0.50NANANA0.904.00
MEMS (kg/m2)NANANANANA1.02

NOTES: NA denotes not applicable based on currently available information.

40 C.F.R. 98 app Table I-1 to Subpart I of Part 98

75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68221, Nov. 13, 2013