The owner or operator of a semiconductor operation must maintain monthly records that clearly document all purchased quantities of the fluorinated gases and fluorinated heat transfer fluids as defined in section 95322. All records required by this subsection (a) must be readily accessible on site for inspection and review by the permitting agency or the Air Resources Board at the semiconductor operation for at least three calendar years. If so requested by the permitting agency or the Air Resources Board, the owner or operator must provide copies of the records to the permitting agency or the Air Resources Board. The owner or operator of a semiconductor operation that emits 0.0008 MMT or less of CO2e per calendar year may keep annual in lieu of monthly records.
The owner or operator of a semiconductor operation must maintain monthly records of the occurrence, date of occurrence, duration, cause (if known), and action taken for each equipment malfunction and/or failure. All records must be maintained for at least three calendar years.
Cal. Code Regs. Tit. 17, § 95325
Note: Authority cited: Sections 38501, 38510, 38560, 38560.5, 38580, 39600 and 39601, Health and Safety Code. Reference: Sections 38501, 38505, 38510, 38550, 38551, 38560, 38560.5, 39600 and 39601, Health and Safety Code.