CREE, INC.Download PDFPatent Trials and Appeals BoardJul 22, 20202019003790 (P.T.A.B. Jul. 22, 2020) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 14/259,821 04/23/2014 Qingchun Zhang 1194-200 1023 27820 7590 07/22/2020 WITHROW & TERRANOVA, P.L.L.C. 106 Pinedale Springs Way Cary, NC 27511 EXAMINER PIZARRO CRESPO, MARCOS D ART UNIT PAPER NUMBER 2814 NOTIFICATION DATE DELIVERY MODE 07/22/2020 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): patents@wt-ip.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________ Ex parte QINGCHUN ZHANG ____________ Appeal 2019-003790 Application 14/259,821 Technology Center 2800 ____________ Before ADRIENE LEPIANE HANLON, MICHAEL G. McMANUS, and MERRELL C. CASHION, JR., Administrative Patent Judges. CASHION, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE Pursuant to 35 U.S.C. § 134(a), the Appellant1 appeals from a Final Office Action rejecting claims 1–11, 13, 14, and 31–33. We have jurisdiction under 35 U.S.C. § 6. We AFFIRM. 1 We use the word “Appellant” to refer to “applicant” as defined in 37 C.F.R. § 1.42. Appellant identifies the real party in interest as Cree, Inc. Appeal Br. 1. Appeal 2019-003790 Application 14/259,821 2 Claim 1 is illustrative of the subject matter on appeal and is reproduced below (formatting added): 1. An insulated gate bipolar transistor (IGBT) device comprising: an IGBT stack comprising: an injector region, the injector region having a first conductivity type and providing a first surface of the IGBT stack; a drift region over the injector region opposite the first surface, the drift region having a second conductivity type that is opposite the first conductivity type; a pair of junction implants in the IGBT stack along a second surface of the IGBT stack, which is opposite the first surface; a junction field effect transistor (JFET) region between the pair of junction implants along the second surface of the IGBT stack, the JFET region having the second conductivity type and a doping concentration that is different from a doping concentration of the drift region; a spreading region between the drift region and the JFET region, the spreading region having the second conductivity type and a doping concentration that is different from the doping concentration of the drift region and the doping concentration of the JFET region; a field termination well etched in a surface of the JFET region opposite the drift region and between the pair of junction implants; and Appeal 2019-003790 Application 14/259,821 3 a field termination region filling the field termination well, the field termination region having the first conductivity type and comprising a same material as the drift region, the spreading region, and the JFET region; wherein the field termination region is provided by a first epitaxial structure and the JFET region is provided by a second epitaxial structure that is different from the first epitaxial structure; a collector contact over the first surf ace; and a gate contact and an emitter contact on the second surface. Appellant requests review of the following rejections from the Examiner’s Final Office Action: I. Claims 1–4, 7–11, 13, 14, and 31–33 rejected under 35 U.S.C. § 103 as unpatentable over Ryu (US 2010/0301335 A1, published December 2, 2010), Zhang (US 2010/0140628 A1, published June 10, 2010), and Yilmaz (US 5,136,349, issued August 4, 1992).2 II. Claims 5 and 6 rejected under 35 U.S.C. § 103 as unpatentable over Ryu, Zhang, Yilmaz, and Merrill (US 5,661,314, issued August 26, 1997). Appellant presents arguments only for claim 1 and relies on these arguments to address the rejection of the remaining claims. Appeal Br. 6. We select claim 1 as representative of the subject matter on appeal and 2 Claims 31–33 were inadvertently omitted from the rejection statement. However, the Examiner addressed these claims in the discussion of the rejection (Final Act. 5–6) and Appellant acknowledges that the claims stand rejected (Appeal Br. 6). We therefore find this omission to be harmless error. Appeal 2019-003790 Application 14/259,821 4 decide the appeal as to all grounds of rejection based on the arguments Appellant makes in support of the patentability of claim 1. OPINION CLAIM INTERPRETATION As a preliminary matter, our review of the Examiner’s analysis requires us to construe the claim 1 language “the JFET region is provided by a second epitaxial structure that is different from the first epitaxial structure [of the field termination region]” to define its scope and meaning. See Gechter v. Davidson, 116 F.3d 1454, 1457 (Fed. Cir. 1997). Specifically, to give proper weight to the evidence of record and the respective positions of Appellant and the Examiner, we must first determine what does “different” mean in relation to the first and second epitaxial structures. Thus, the review of the grounds of rejection of the appealed claims necessarily entails the interpretation of the scope of the appealed claims, giving the broadest reasonable interpretation to the terms thereof consistent with the written description provided in Appellant’s Specification as it would be interpreted by one of ordinary skill in this art. See In re Morris, 127 F.3d 1048, 1054 (Fed. Cir. 1997). Terms in the appealed claims must be given their broadest reasonable interpretation including the ordinary meaning unless another meaning is intended by Appellant as established in the written description of their Specification. See, e.g., In re Zletz, 893 F.2d 319, 321–22 (Fed. Cir. 1989). When the Specification does not contain an express definition, a reasonable, supported interpretation of the appealed claims that differs from that urged by applicants can be used to determine the patentability of the claims. Morris, 127 F.3d at 1055–56 (“Absent an express definition in their Appeal 2019-003790 Application 14/259,821 5 specification, the fact that appellants can point to definitions or usages that conform to their interpretation does not make the PTO’s definition unreasonable when the PTO can point to other sources that support its interpretation.”). Indeed, “[i]t is the applicants’ burden to precisely define the invention, not the PTO’s. See 35 U.S.C. § 112 ¶ 2 [statute omitted].” Morris, 127 F.3d at 1055–56. The noted limitation was added via amendment on November 22, 2017. While the term “epitaxial structure” does not appear in the Specification, as originally filed, the Specification does describe that the field termination region and the JFET region can each be made via an epitaxial process. Spec. ¶ 39 (describing that “the JFET region 76 [in Figure 4E] may be provided via an epitaxial growth process that takes place before providing the junction implants 60”), id., ¶ 40 (describing the formation of the field termination region 62 in Figure 4H via an epitaxial process). Therefore, each of the field termination region and the JFET region in the claimed IGBT device may have an epitaxial structure resulting from the respective epitaxial process used to form them. We next consider the meaning of “different” epitaxial structures. The Examiner’s broadest reasonable interpretation of the noted language is that the claimed first and second epitaxial structures are different in the sense that each is formed by different epitaxial processes during the formation of the IGBT device. Ans. 8. In other words, each of the first and second epitaxial structures is formed by a separate epitaxial process during the formation of the IGBT device. This interpretation is consistent with the noted disclosure in paragraphs 39–40 of the Specification. Appeal 2019-003790 Application 14/259,821 6 Appellant does not dispute adequately the Examiner’s interpretation of the claim language in the Appeal and Reply Briefs. See generally Appeal and Reply Br.’s. Therefore, we agree with the Examiner’s broadest reasonable interpretation of the claim 1 language “the JFET region is provided by a second epitaxial structure that is different from the first epitaxial structure [of the field termination region]” as meaning that each region is made by a separate epitaxial process during the formation of the IGBT device. REJECTIONS After review of the respective positions the Appellant and the Examiner present, we AFFIRM the Examiner’s rejection of claims 1–11, 13, 14, and 31–33 under 35 U.S.C. § 103 for the reasons the Examiner provides in the Final Action and the Answer. We add the following for emphasis. Claim 1 recites an insulated gate bipolar transistor (IGBT) device comprising a field termination region provided by a first epitaxial structure and a junction field effect transistor (JFET) region provided by a second epitaxial structure that is different from the first epitaxial structure. The Examiner determines that the combined teachings of Ryu, Zhang and Yilmaz suggest an IGBT device satisfying all of the limitations of claim 1 and concludes that the combined teachings would have rendered the claim obvious. Final Act. 3–4. Appellant argues that the cited art does not teach a field termination region provided by a first epitaxial structure and a JFET region provided by a second epitaxial structure that is different than the first epitaxial structure of the field termination region as claimed. Appeal Br. 5. According to Appellant, there are physical differences between the claimed IGBT device Appeal 2019-003790 Application 14/259,821 7 and a conventional IGBT device having a field termination well provided via an ion implantation process. Id. Specifically, Appellant argues that the way the claimed IGBT is made avoids defects that may otherwise be caused if the field termination region 62 is made via an ion implantation process. Id. Appellant asserts that the claimed IGBT device maintains the integrity of the IGBT stack and increases the performance of the IGBT device. Id. Appellant’s arguments are not persuasive of reversible error because the arguments do not address the rejection the Examiner presents. It is well established that the obviousness inquiry does not ask “whether the references could be physically combined but whether the claimed inventions are rendered obvious by the teachings of the prior art as a whole.” In re Etter, 756 F.2d 852, 859 (Fed. Cir. 1985) (en banc); see also In re Keller, 642 F.2d 413, 425 (CCPA 1981) (stating “[t]he test for obviousness is not whether the features of a secondary reference may be bodily incorporated into the structure of the primary reference”). “[T]he test [for obviousness] is what the combined teachings of the references would have suggested to those of ordinary skill in the art.” Keller, 642 F.2d at 425–26. The Examiner’s rejection is based on the combined teachings of Ryu, Zhang, and Yilmaz. Final Act. 3–4. As the Examiner explains in the Answer, Zhang teaches that it is conventional to make a JFET region of an IGBT device via an epitaxial process. Ans. 8; Zhang ¶¶ 47–50. The Examiner also notes that Yilmaz teaches epitaxially growing the drift region 64 in which the field termination region 40 is ultimately formed. Ans. 8; Yilmaz col. 5, ll. 5–9, 15–17. While Yilmaz discloses forming the field termination region preferably by ion implantation (Yilmaz col. 8, ll. 44–47), the teachings of the cited prior art as a whole suggest that it is well known to Appeal 2019-003790 Application 14/259,821 8 deposit layers for an IGBT device through an epitaxial process. See Ryu ¶ 46; Zhang ¶¶ 9, 33, 35, 36; Yilmaz col. 1, ll. 33–50, col. 5, ll. 1–7, col. 8, ll. 24–38. In fact, Zhang recognizes that epitaxial processes and ion implantation processes are known to form layers of an IGBT device. Zhang ¶ 35 (discussing formation of a JFET region using either an epitaxial process or an ion implantation process). Thus, Appellant has not adequately explained why one skilled in the art, using no more than ordinary creativity, would not have been capable of making an IGBT device comprising a field termination region and a JFET region made by separate epitaxial processes. See KSR Int’l Co. v. Teleflex Inc., 550 U.S. 398, 421 (2007) (“A person of ordinary skill is also a person of ordinary creativity, not an automaton.”); see also In re Sovish, 769 F.2d 738, 743 (Fed. Cir. 1985) (presuming skill on the part of one of ordinary skill in the art). Moreover, given that the prior art recognizes that layers for an IGBT device can be formed by epitaxial processes, there is a reasonable basis for one skilled in the art to reasonably expect that the IGBT device from the combined teachings of the prior art having the field termination region and JFET region with epitaxial structures would possess the characteristics of the claimed invention. Appellant has not explained adequately how the claimed IGBT device differs structurally from the IGBT device resulting from the combined teachings of the applied prior art. See In re Spada, 911 F.2d 705, 708 (Fed. Cir. 1990) and In re Best, 562 F.2d 1252, 1254–56 (CCPA 1977) (explaining that when the Examiner establishes a reasonable basis for concluding that the claimed and prior art products appear to be the same, the burden is properly shifted to the applicant to show that they are not). In addition, Appellant has not directed us to any objective evidence that Appeal 2019-003790 Application 14/259,821 9 supports adequately the assertion that there are physical differences between the claimed IGBT device and the IGBT device from the combined teachings of the cited art. Appellant’s attorney arguments cannot take the place of evidence. See In re De Blauwe, 736 F.2d 699, 705 (Fed. Cir. 1984); In re Payne, 606 F.2d 303, 315 (CCPA 1979). Accordingly, we affirm the Examiner’s prior art rejections of claims 1–11, 13, 14, and 31–33 under 35 U.S.C. § 103 for the reasons the Examiner presents and we give above. CONCLUSION In summary: Claims Rejected 35 U.S.C. § Reference(s)/Basis Affirmed Reversed 1–4, 7–11, 13, 14, 31–33 103 Ryu, Zhang, Yilmaz 1–4, 7–11, 13, 14, 31–33 5, 6 103 Ryu, Zhang, Yilmaz, Merrill 5, 6 Overall Outcome 1–11, 13, 14, 31–33 No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv). AFFIRMED Copy with citationCopy as parenthetical citation